MULTIPURPOSE SENSOR TIPS FOR SCANNING NEAR-FIELD MICROSCOPY

The reproducible micromachining of hollow metal tips on Si cantilevers and their applicability to scanning probe microscopy techniques are d escribed. Provided with apertures below 130 nm and hollow pyramidal ti ps proved to be highly suited probes for scanning near-field optical m icroscopy (SNOM). First results of combined SFM/SNOM measurements toge ther with scanning electron microscopy (SEM) photographs of the new se nsors are presented. The SNOM images show a resolution of about 100 nm demonstrating the usefulness of these probes. (C) 1996 American Insti tute of Physics.