MEGAHERTZ OPTOMECHANICAL MODULATOR

Authors
MARXER C GRETILLAT MA JAECKLIN VP BAETTIG R ANTHAMATTEN O VOGEL P
Citation
C. Marxer et al., MEGAHERTZ OPTOMECHANICAL MODULATOR, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 46-50
Citations number
13
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
52
Issue
1-3
Year of publication
1996
Pages
46 - 50
Database
ISI
SICI code
0924-4247(1996)52:1-3<46:MOM>2.0.ZU;2-Y
Abstract
In this paper a Fabry-Perot modulator fabricated by surface micromachi ning is presented. The modulator is optimized for a wavelength of 1.3 mu m and intended for fiber-in-the-loop applications. It consists of a double-supported polysilicon beam separated from an underlying polysi licon electrode by an air gap. The two polysilicon electrodes form the mirrors of the Fabry-Perot cavity, By electrostatic actuation the opt ical path between the mirrors can be reduced, which results in modulat ion of the reflectivity. Characterization of the modulator shows a max imum on-off ratio of 9 dB. The observed modulator behavior indicates a maximum modulation rate of 2.8 Mbit s(-1).