This paper presents an integrated pyroelectric sensor based on a vinyl
idene fluoride-trifluoroethylene (VDF/TrFE) copolymer. A silicon subst
rate that contains field-effect transistor (FET) readout electronics i
s coated with the VDF/TrFE copolymer film using a spin-coating techniq
ue. On-chip poling of the copolymer has been applied using a step-wise
poling at room temperature. The copolymer deposition and polarization
are compatible with semiconductor technology, An array of 3 X 1 integ
rated pyroelectric sensor has been realized. The current and voltage s
ensitivities and noise of this sensor have been measured. Voltage nois
e decreases with increasing frequency, and it is 2 nV (Hz)(-1/2) at 10
0 kHz.