A 3X1 INTEGRATED PYROELECTRIC SENSOR-BASED ON VDF TRFE COPOLYMER/

This paper presents an integrated pyroelectric sensor based on a vinyl idene fluoride-trifluoroethylene (VDF/TrFE) copolymer. A silicon subst rate that contains field-effect transistor (FET) readout electronics i s coated with the VDF/TrFE copolymer film using a spin-coating techniq ue. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology, An array of 3 X 1 integ rated pyroelectric sensor has been realized. The current and voltage s ensitivities and noise of this sensor have been measured. Voltage nois e decreases with increasing frequency, and it is 2 nV (Hz)(-1/2) at 10 0 kHz.