ALUMINUM PRESS-ON CONTACTS FOR GLASS-TO-SILICON ANODIC BONDING

Authors
KADAR Z BOSSCHE A MOLLINGER J
Citation
Z. Kadar et al., ALUMINUM PRESS-ON CONTACTS FOR GLASS-TO-SILICON ANODIC BONDING, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 151-155
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
52
Issue
1-3
Year of publication
1996
Pages
151 - 155
Database
ISI
SICI code
0924-4247(1996)52:1-3<151:APCFGA>2.0.ZU;2-9
Abstract
In this paper a glass-to-silicon anodic bonding experiment is describe d. A test chip has been designed and realized containing special struc tures to study the performance of the different types of press-on cont acts, which are realized by forming metal patterns at the same positio n on the silicon and glass surfaces. The other goal of the experiment is to examine the step coverage of the aluminium patterns on glass.