J. Bienstman et al., AN OSCILLATOR CIRCUIT FOR ELECTROSTATICALLY DRIVEN SILICON-BASED ONE-PORT RESONATORS, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 179-186
This paper describes design considerations and characteristics of osci
llator circuitry for electrostatically driven silicon-based one-pea re
sonators, used as resonant strain gauges. The oscillation conditions f
or a general, single transconductance oscillator are theoretically der
ived. In order to start oscillation, guidelines to select proper bias
conditions for the resonator are presented, taking the non-linear effe
cts into account. An oscillator circuit has been designed in CMOS tech
nology in order to verify the theory experimentally. Experimental resu
lts of the oscillator in combination with a silicon beam resonator are
given.