Photoluminescence spectra were obtained from thin Si1-xGex quantum wel
ls grown by molecular-beam epitaxy and rapid thermal chemical-vapor de
position. The effect of excitation power density is compared with rece
nt results for thick quantum wells, in which a high-quantum-efficiency
localized exciton luminescence band was observed under conditions of
low excitation. The separation between the usual near-band-edge lumine
scence and the localized exciton feature is found here to decrease fro
m 20 to approximately 0 meV when the quantum-well thickness is decreas
ed from 83 to 12 angstrom. In the very thin quantum wells (10- 15 angs
trom) the spectral line shape and position change very little with exc
itation density changes of over six orders of magnitude. However, the
dependence of the luminescence intensity on excitation power and the v
ery long decay time (approximately 750 musec) at low excitation lead u
s to propose that a localized exciton process is also important in the
very thin quantum wells grown by both techniques.