We have measured the tunneling spectra of c-axis-oriented YBCO films p
repared by the sputtering method. In some spats, the spectra show peri
odic current steps at the corresponding voltages of V = (2n + 1)delta
V/2 or V = n delta V, We have measured delta V with the variation of t
he sample-to-tip distance. The resulting voltage period delta V = e/C
increases as the sample-tu-tip distance increases. This behavior is ex
plained by single electron tunneling. The simulated conductance, with
the assumption of a normal state density of states for both the metal
grains and the YBCO surface layer, shows a good agreement with the exp
erimental result, indicating that rite surface layer of YBCO is in a n
ormal state due to oxygen deficiency.