A CLOSED-LOOP CONTROLLER FOR ELECTRON-BEAM EVAPORATORS

Authors
BAND A STROSCIO JA
Citation
A. Band et Ja. Stroscio, A CLOSED-LOOP CONTROLLER FOR ELECTRON-BEAM EVAPORATORS, Review of scientific instruments, 67(6), 1996, pp. 2366-2369
Citations number
5
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
67
Issue
6
Year of publication
1996
Pages
2366 - 2369
Database
ISI
SICI code
0034-6748(1996)67:6<2366:ACCFEE>2.0.ZU;2-9
Abstract
A simple instrument for automatically controlling the deposition rate of an electron-beam evaporator is described. The design incorporates a commercially available, microprocessor based, proportional-integral-d ifferential process controller that provides loop control and automati c determination of optimal proportional, integral, and differential lo op constants. A logarithmic amplifier is used to linearize the overall loop response. The controller is used in conjunction with a compact e lectron-beam heated evaporator.