OFF-SPECULAR REFLECTIVITY STUDY OF SPUTTER-DEPOSITION OF PLATINUM DURING GROWTH

A series of off-specular diffuse scattering measurements were performe d by scanning the detector parallel to the sample surface during growt h of platinum films on polished silicon substrates. During early stage of island growth, we observe a halo of diffuse scattering around the specular reflection which is similar in origin to Henzler's ring (P. H ahn, J. Clabes and M. Henzler, J. Appl. Phys. 51 (1980) 2079). A model of random islands was developed to explain the halo of diffuse scatte ring. During late growth, the film surface was consistent with a parti ally self-affine surface.