PHASE-SENSITIVE MULTIPLE-DIFFRACTION STUDIES OF SINGLE-CRYSTALS

A new phase-sensitive multiple-diffraction method is presented that pe rmits characterization of the strain in thin subsurface layers in sing le crystals. The method is based on measuring the rocking curves far f rom the area of strong multi-beam interaction in the angular range cor responding to total reflection of one beam. The reflectivity dependenc e of the other, weak, beam bears information on the phase of the stron g reflection. The method was tested on perfect Si(111) crystals, then successfully applied to a crystal with a strained subsurface layer. Th e results of the experimental studies of an ion-implanted Si(400) crys tal are presented. All measurements were performed with the use of syn chrotron radiation at Photon Factory (Japan) and Daresbury and Rutherf ord Appleton Laboratory (UK).