X-RAY REFLECTION FROM ROUGH LAYERED SYSTEMS

The specular and nonspecular x-ray reflectivity of a rough multilayer is calculated on the basis of the distorted-wave Born approximation. T he theory explains the existence of maxima in the angular distribution of a nonspecularly reflected wave. The interface roughness has been c haracterized by root-mean-square roughness, lateral correlation length , and the fractal dimension of the interface. It has been demonstrated that these parameters can be obtained from nonspecular reflectivity m easurements. Calculations based on this theory compare well with data measured on rough layered samples.