C. Schramm et al., DESIGN AND REALIZATION OF WAVE-GUIDE INTEGRATED ALINAS GAINAS HEMTS REGROWN BY MBE FOR HIGH BIT-RATE OPTOELECTRONIC RECEIVERS ON INP/, Electronics Letters, 32(12), 1996, pp. 1139-1141
The successful fabrication of AlInAs/GaInAs HEMTs, regrown by MBE on p
atterned optical waveguide surfaces after the local removal of a previ
ously grown photodiode layer stack, is reported. The devices are part
of a distributed amplifier within an integrated optoelectronic receive
r intended to operate at a 1.55 mu m wavelength and at bit rates of 20
and/or 40Gbit/s. The performance of the HEMTs is highly comparable to
reference devices grown on planar surfaces.