USE OF NEURAL NETWORKS FOR LPCVD REACTORS MODELING

Authors
FAKHREDDINE K CABASSUD M DUVERNEUIL P LELANN MV COUDERC JP
Citation
K. Fakhreddine et al., USE OF NEURAL NETWORKS FOR LPCVD REACTORS MODELING, Computers & chemical engineering, 20, 1996, pp. 521-526
Citations number
6
Categorie Soggetti
Computer Application, Chemistry & Engineering","Engineering, Chemical","Computer Science Interdisciplinary Applications
Journal title
Computers & chemical engineering → ACNP
ISSN journal
00981354
Volume
20
Year of publication
1996
Supplement
A
Pages
521 - 526
Database
ISI
SICI code
0098-1354(1996)20:<521:UONNFL>2.0.ZU;2-5
Abstract
In this paper an alternative approach to LPCVD modelling is presented. The reactor has been broken up into a number of basic elements. A neu ral network has been elaborated to represent this basic element. The o bjective is to provide a simulation model which can be used to compute on-line the film thickness on each wafer in order to develop a contro ller of LPCVD reactors.