HYBRID INTEGRATION ONTO SILICON MOTHERBOARDS WITH PLANAR SILICA WAVE-GUIDES

Silicon micromachining can be used in conjunction with silica on silic on waveguide technology to fabricate hybrid optical motherboards. Thes e motherboards comprise optical and electrical interconnects, alignmen t features for integration of optoelectronic components and electronic circuitry. The development of the principal building blocks of an opt ical motherboard, and the fabrication of a hybrid integrated optical t ransceiver, are described.