Titanium oxide thin film could be prepared from (NH4)(2)TiF6 aqueous s
olution with addition of boric acid by Liquid Phase Deposition (LPD) p
rocess. The aspect and chemical composition of the deposited films wer
e different according to the concentration range of (NH4)(2)TiF6 and H
3BO3 in the treatment solution. The deposition rate of transparent TiO
2 film increased with increasing concentration of added H3BO3.