RADIATION-INDUCED THERMALLY STIMULATED LUMINESCENCE AND CONDUCTIVITY IN SIMOX OXIDES

Thermally Stimulated Luminescence (TSL) and Conductivity (TSC) induced by X-ray irradiation in SIMOX buried oxides have been studied from ro om temperature up to 400 degrees C. The characteristics of an X-ray in duced TSL glow peak detected around 62 degrees C are presented; specif ically, results on the emission wavelength and trap depth are shown. T he X-ray induced TSC, observed at approximately 70 degrees C, is due t o the same trapped species responsible of the TSL emission. The stabil ity after irradiation and dose dependence of both TSL and TSC signals have also been investigated. The results have been compared with simil ar studies on high temperature annealed thermal SiO2 films and bulk ma terials.