APPLICATION OF THE LIGA PROCESS IN MICROO PTICS

The LIGA technique (German acronym for LIthographie, Galvanoformung, A bformung) is a powerful tool for mass production of high aspect ratio microstructures and microsystems. The materials used in this process a re metals, polymers and also ceramics. For these reasons, the LIGA can be complementary of other micromachining processes. In this paper, we report the different steps of this technique, its applications in mic ro-optics and its later evolutions.