Epitaxial, high-T-c superconductor/normal-metal/superconductor (SNS) e
dge-geometry weak links and superconducting quantum interference devic
es (SQUIDs) have been fabricated with integrated YBa2Cu3O7 (YBCO) grou
ndplanes and SrTiO3 insulators, using a process which incorporates six
epitaxial layers. The SNS edge junctions were produced using off-axis
sputtered films and Co-doped-YBCO normal metal interlayers. These dev
ices show excellent performance with typical critical current-resistan
ce (I(c)R(n)) products of 500-800 mu V for 100-150 Angstrom thick norm
al metal layers at 65 K, and 1-sigma critical current density (J(c)) s
preads as small as 12%. SNS SQUIDs incorporating groundplanes exhibit
voltage modulation of up to 130 mu V at 65 K and 40 mu V at 77 K. SQUI
D inductance measurements indicate microstrip inductance values of 1 p
H per square at 65 K. (C) 1996 American Institute of Physics.