PE-MOCVD OF DIELECTRIC THIN-FILMS - CHALLENGES AND OPPORTUNITIES

Authors
DEY SK ALLURI PV
Citation
Sk. Dey et Pv. Alluri, PE-MOCVD OF DIELECTRIC THIN-FILMS - CHALLENGES AND OPPORTUNITIES, MRS bulletin, 21(6), 1996, pp. 44-48
Citations number
7
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
21
Issue
6
Year of publication
1996
Pages
44 - 48
Database
ISI
SICI code
0883-7694(1996)21:6<44:PODT-C>2.0.ZU;2-#