Ultrathin Langmuir-Blodgett (LB) multilayers have been the focus of in
terest for use as gas separation membranes because of their well-defin
ed thickness and defect-free structure. A considerable drawback from a
technological point of view is the low thermal, chemical and mechanic
al stability of these films. One solution to this problem is the conve
rsion of an organic multilayer structure, containing inorganic ions, t
o an organo-ceramic ultrathin film by low-temperature plasma treatment
. This article describes the interfacial behaviour and the deposition
of magnesium stearate monolayers and their subsequent conversion to or
gano-ceramic structures. X-ray, FTIR and AFM measurements were used to
characterize the Langmuir-Blodgett (LB) multilayer Structures, chemic
al compositions and surface topographics respectively: The LB-films co
nsist of highly ordered Y-type multilayer structures with a stepwise s
urface height profile and nearly all amphiphiles are complexed as the
magnesium salt. The modification of these LB-films by both argon and o
xygen plasma leads to a decrease in the content of organic material by
physical ablation and chemical etching processes. Whilst an internal
order is retained within the plasma-treated films, the surface roughne
ss increases significantly. Two parameters of the plasma process, the
radio frequency power and the exposure time, were varied in order to f
ind suitable process conditions. It is shown that the non-uniform mult
ilayer structure can be converted to a uniform grainy organo-ceramic s
tructure by plasma treatment.