NUMERICAL STUDY OF GASDYNAMICS INFLUENCE ON 3-DIMENSIONAL TRANSPORT PHENOMENA IN VERTICAL ZINC SELENIDE LPCVD REACTOR

Authors
GARIBIN EA MIRONOV IA KHORUZHNIKOV SE VOROBEV AN
Citation
Ea. Garibin et al., NUMERICAL STUDY OF GASDYNAMICS INFLUENCE ON 3-DIMENSIONAL TRANSPORT PHENOMENA IN VERTICAL ZINC SELENIDE LPCVD REACTOR, Materials science & engineering. B, Solid-state materials for advanced technology, 39(1), 1996, pp. 8-14
Citations number
10
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
39
Issue
1
Year of publication
1996
Pages
8 - 14
Database
ISI
SICI code
0921-5107(1996)39:1<8:NSOGIO>2.0.ZU;2-T
Abstract
The chemical vapour deposition of polycrystalline zinc selenide in a v ertical rectangular reactor is numerically simulated on the basis of t he three-dimensional transport equations for low Mach number flows. Th e results obtained suggest two different regimes of mass transfer. The influence of carrier gas flow rate on the process efficiency and the uniformity of deposited layers is analysed.