T. Kudoh et al., A HIGHLY SENSITIVE THERMISTOR BOLOMETER FOR A CLINICAL TYMPANIC THERMOMETER, Sensors and actuators. A, Physical, 55(1), 1996, pp. 13-17
A newly designed infrared radiation sensor for a clinical tympanic the
rmometer has been developed. A very small packaging size (2.2 mm x 2.3
mm x 0.8 mm) is achieved so that the sensor can be used in the human
auricle. To realize high sensitivity, infrared sensing regions in the
shape of a pair of micro-air-bridges are encapsulated in a vacuum micr
ochamber through a successive silicon batch process using micromachini
ng techniques. The sensor shows a sensitivity R(v) of 5000 V W-1 and a
noise equivalent temperature difference (NETD) of 0.062 degrees C at
a d.c. bias voltage of 1.56 V.