ROLE OF SURFACE-CHEMISTRY IN SEMICONDUCTOR THIN-FILM PROCESSING

Authors
EKERDT JG SUN YM SZABO A SZULCZEWSKI GJ WHITE JM
Citation
Jg. Ekerdt et al., ROLE OF SURFACE-CHEMISTRY IN SEMICONDUCTOR THIN-FILM PROCESSING, Chemical reviews, 96(4), 1996, pp. 1499-1517
Citations number
214
Categorie Soggetti
Chemistry
Journal title
Chemical reviews → ACNP
ISSN journal
00092665
Volume
96
Issue
4
Year of publication
1996
Pages
1499 - 1517
Database
ISI
SICI code
0009-2665(1996)96:4<1499:ROSIST>2.0.ZU;2-Y