X-RAY-DIFFRACTION INVESTIGATION OF POROUS SILICON SUPERLATTICES

High-resolution X-ray diffraction has been used for the structural cha racterization of thin single porous silicon (PS) layers and superlatti ces. Thin PS layers, in the range of 100-1000 nm, exhibit several thic kness interfringes, giving evidence for the lateral homogeneity of the layer thickness. For PS superlattices, several satellite reflections are visible in the diffraction pattern. The analysis of these experime ntal results using simulations allows us to deduce structural informat ion of this new kind of silicon heterostructure.