Ultrathin nanoporous Si layers (UPSL) were prepared on n-Si(100) by an
odization in aqueous NH4F solution starting from an electrochemically
hydrogenated surface. The thickness of the UPSL was controlled with fi
eld emission scanning electron microscopy, The interface state density
(D-it) of UPSL was measured with a field-dependent pulsed surface pho
tovoltage technique. The value of D-it, normalized to the surface area
of UPSL is about 1.3 x 10(11) eV(-1) cm(-2). Au/UPSL/n-Si structures
were characterized with temperature-dependent current-voltage measurem
ents. The room-temperature barrier height and the ideality factor at t
he Au/UPSL interface were 0.75 eV and 1.8, respectively. The temperatu
re dependence of the reverse current of Au/UPSL/n-Si structures showed
two regions with activation energies at 120 meV and about 60 meV for
temperatures below and above 200 K, respectively. Strong near-infrared
electroluminescence was observed for Au/UPSL/n-Si structures. The res
ults are discussed on the basis of the role of Si nanostructure surfac
e conditioning with regard to the porous Si electronic properties.