METALLIZATION OF POROUS SILICON BY CHEMICAL-VAPOR INFILTRATION AND DEPOSITION

Thin cobalt layers have been grown on and in porous silicon by chemica l vapour infiltration and deposition using HCo(CO)(4). The process can be controlled to give a capping layer with or without metal in the po res. Thin coats on the pore walls have been measured to depths of seve ral mu m and thick coats to depths of 0.1 mu m. Results from mass spec troscopy indicate that when a cobalt hydride precursor molecule decomp oses on a pore wall it releases its hydrogen atom accompanied by three from the pore wall, so forming direct metal-silicon bonds.