VARIABLE REFLECTIVITY MIRRORS WITH ALL PROFILED LAYERS

Authors
DINCA A TRIFAN ME LUPEI V DINCA MP
Citation
A. Dinca et al., VARIABLE REFLECTIVITY MIRRORS WITH ALL PROFILED LAYERS, Optics communications, 127(4-6), 1996, pp. 176-182
Citations number
10
Categorie Soggetti
Optics
Journal title
Optics communications → ACNP
ISSN journal
00304018
Volume
127
Issue
4-6
Year of publication
1996
Pages
176 - 182
Database
ISI
SICI code
0030-4018(1996)127:4-6<176:VRMWAP>2.0.ZU;2-R
Abstract
The paper describes die design and realization of variable reflectivit y mirrors (VRM). A deposition model which considers the mask aperture as an extended source with a cos(x)(theta) angular distribution was us ed in order to obtain the radial thickness profile. For a certain mult ilayer system, deposited with a fixed mask, a map relating the reflect ance profile parameters to die deposition geometry was calculated. The experimental results are also presented.