CHARACTERIZATION OF AMORPHOUS-CARBON COATED SILICON FIELD EMITTERS

Amorphous carbon was deposited on needle-shaped Si field emitters by f iltered cathodic are. Electron emission was obtained from these coated cathodes, but was reduced compared to emission from uncoated Si catho des. Electron energy loss spectroscopy indicated that the coating was a high sp(2) content amorphous carbon. Au particles were found to have precipitated out of the Si emitters, which were grown by a vapor-liqu id-solid technique utilizing the Au-Si eutectic during the oxidation a nd chemical etch sharpening of the emitters. High resolution transmiss ion electron microscopy and selected area electron diffraction confirm ed the amorphous nature of the coating and the presence of the Au part icles at the Si surface. The field emission, electron energy loss spec troscopy, high resolution transmission electron microscopy, and select ed area electron diffraction results are presented and discussed. (C) 1996 American Vacuum Society.