A quantitative investigation of laser-induced removal of particles fro
m magnetic head slider surfaces has been carried out. The damage thres
holds of magnetic head sliders for laser fluence and pulse number were
found to be about 150 mJ/cm(2) and 5000 pulses at 100 mJ/cm(2), respe
ctively. For laser fluence or pulse number above the damage threshold,
laser irradiation onto magnetic head slider surfaces can cause microc
racks around the pole tips. It is found that laser cleaning efficiency
increases with increasing laser fluence and pulse number, but does no
t depend on repetition rate up to 30 Hz. Laser cleaning efficiency of
removing particles from magnetic head slider surfaces can reach about
90% for Al particles and 100% for Sn particles, respectively, under ap
propriate conditions without causing damage. The mechanisms of laser c
leaning of particles from magnetic head slider are laser-induced surfa
ce vibration, particle vibration, particle thermal expansion, and abla
tion with high laser fluence, which produce forces strong enough to de
tach particles from slider surfaces. Based on the above cleaning mecha
nisms, the dependence of laser cleaning efficiency on laser parameters
can be explained. (C) 1996 American Institute of Physics.