Thin films of the recently discovered intermetallic superconducting co
mpound YNi2B2C have been grown in situ using a magnetron sputtering te
chnique. High quality, c-axis oriented, films were obtained on MgO sub
strates held at about 800 degrees C during the sputtering process. The
best films showed maximum T-c = 15.25 K (onset), a transition width o
f approximate to 0.3 K, a room-temperature resistivity of 53+/-3 mu Om
ega cm, a residual resistivity ratio up to approximate to 5.4, a low-t
emperature critical current J(c) approximate to 10(5) A/cm(2) and B-c2
greater than or equal to 6 T. Superconducting films were also obtaine
d on sapphire and LaAlO3 substrates. (C) 1996 American Institute of Ph
ysics.