Sc. Yu et al., UNDERLAYER THICKNESS DEPENDENCE OF MAGNETIC-PROPERTIES OF CO83CR17 CO96ZR4 DOUBLE-LAYER BY FTS SYSTEM/, Journal of magnetism and magnetic materials, 155(1-3), 1996, pp. 225-227
The two step sputtering method with facing targets sputtering (FTS) sy
stem was employed in continuously depositing Co83Cr17 layer with good
c-axis orientation, large saturation magnetization and remarkable perp
endicular magnetic anisotropy on a very thin underlayer of amorphous C
o96Zr4 on slide glass substrate. The optimum thickness of the amorphou
s Co96Zr4 underlayer was about 400 Angstrom for improving perpendicula
r magnetic anisotropy of 4000 Angstrom thick Co83Cr17 layer.