THERMAL-BEHAVIOR OF VANADOCENE

This paper reports an investigation of the thermal behavior of vanadoc ene (Cp(2)V, where Cp = C5H5) between 373 and 473 K by thermogravimetr y, differential thermal analysis, X-ray diffraction, infrared spectrom etry and mass spectrometry. The results show that below 400 K the pred ominant vaporization process is the sublimation of Cp(2)V. Above 403 K a solid state mechanism resulting from the breaking of the central bo nd of the organometallic compound prevails. Vanadocene has been propos ed as a promising precursor for the chemical vapor deposition (CVD) of vanadium carbide. Previous CVD experiments have stressed the dependen ce between the vanadocene vaporization process and the properties of t he deposited vanadium carbide. The detailed results presented here ide ntify the nature of the vaporized species as a function of the vanadoc ene temperature, in the temperature range of interest for CVD. These r esults should provide greater insight and control of the CVD of vanadi um carbide from vanadocene.