MATERIAL REMOVAL AND PLASMADYNAMICS DURING PULSED-LASER DEPOSITION BYEXCIMER AND CO2-LASER RADIATION

The laser-induced material removal and plasma formation during pulsed laser deposition (PLD) with CO2 and excimer laser radiation are simula ted. The weight loss of the target is determined by the process of hea ting and the dynamics of the plasma state above the target. The plasma state depends on the wavelength and the fluence of the laser radiatio n and the pressure of the processing gas. In the case of CO2 laser rad iation the plasma state influences the weight loss significantly, whil e in the case of excimer laser radiation there is less influence.