T. Makimura et K. Murakami, DYNAMICS OF SILICON PLUME GENERATED BY LASER-ABLATION AND ITS CHEMICAL-REACTION, Applied surface science, 96-8, 1996, pp. 242-250
Citations number
19
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Chemical reaction of laser-ablated silicon particles with oxygen gas d
iluted with a helium buffer gas is found by means of soft X-ray absorp
tion spectroscopy. In order to make dear the dynamics of silicon laser
plume and the mechanism of the chemical reaction, we measured time-re
solved spatial distribution of light emission from the laser-ablated p
articles as well as time- and space-resolved emission spectra.