INCREASE OF EFFICIENCY FOR THE XECL EXCIMER-LASER ABLATION OF CERAMICS

Authors
GEIGER M BECKER W REBHAN T HUTFLESS J LUTZ N
Citation
M. Geiger et al., INCREASE OF EFFICIENCY FOR THE XECL EXCIMER-LASER ABLATION OF CERAMICS, Applied surface science, 96-8, 1996, pp. 309-315
Citations number
12
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
96-8
Year of publication
1996
Pages
309 - 315
Database
ISI
SICI code
0169-4332(1996)96-8:<309:IOEFTX>2.0.ZU;2-1
Abstract
The efficiency of XeCl excimer laser ablation of ceramics was increase d by one order of magnitude due to special processing conditions. Incr easing either the temperature of the material beyond 1000 degrees C or using a water film on the workpiece surface enables ablation rates of more than 2 mu m/pulse for Al2O3. The interaction phenomena are studi ed using process diagnostics.