Light emitting silicon has been prepared by Ar laser (514.5 nm) induce
d stain etching and Nd:YAG impulse (532 nm) laser irradiation in air.
Photoluminescence (PL), IR and XPS spectra have been studied. The inte
nsity and position of the PL depend on the power and the duration of l
aser beam treatment during the etching. Correlation between the PL and
chemical bonding is discussed.