RE(1)Ba(2)Cu(3)O(7-delta) (RE = Er or Y) superconducting films were fa
bricated by reactive laser deposition, in situ, on YSZ(100), SrTiO3(10
0) and Si(001), under various conditions. A complete XRD investigation
showed that the films grown with high substrate temperatures (T-s > 7
40 degrees C) combined with low fluences (1.5 J/cm(2) < 2 J/cm(2)) and
laser repetition rate (4 Hz) have the best structural characteristics
, very good electrical and magnetic properties.