Jfm. Cillessen et al., GROWTH, STRUCTURING AND CHARACTERIZATION OF ALL-OXIDE THIN-FILM DEVICES PREPARED BY PULSED-LASER DEPOSITION, Applied surface science, 96-8, 1996, pp. 744-751
Citations number
18
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
The combination of a variety of oxidic thin films in two materials sys
tems is described. The first one focuses on the growth of BaZrO3 on Sr
TiO3 (both perovskites) and the use of these stacks as a substrate for
the growth of magnetic ferrite spinel films. The second system shows
the combination of oxidic conductors, ferroelectrics and semiconductor
s in all-oxide field effect devices. The control of stoichiometry for
the ferroelectric used in this device (consisting of highly volatile c
omponents) as well as the improvement of thickness uniformity using of
f-axis PLD are discussed.