Ferroelectric PbZr0.52Ti0.48O3 (PZT) and Ba0.65Sr0.35TiO3 (BST) thin f
ilms are prepared by laser ablation of sintered ceramic targets. The i
nfluence of the substrate temperature during deposition on the composi
tion and the crystallographic structure is investigated for different
substrates, in order to achieve an oriented or epitaxial growth.