PULSED-LASER DEPOSITED ZNO FOR DEVICE APPLICATIONS

The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actu ators and other sensors being developed at the University of Twente. A ll films are purely c-axis oriented, and results are presented which s uggest the production of some of the highest quality ZnO thin films ye t reported. These include films with rocking curve full-width half-max ima (FWHM) down to 1.2 degrees and (002) 2 theta peak FWHM (corrected) of 0.085 degrees. Principally, X-ray diffraction analysis is detailed , and the shift in (002) peak position with changing deposition condit ions is explored.