AN EXPERIMENTAL-STUDY AND MODELING OF THE THICKNESS DISTRIBUTION IN PULSED-LASER DEPOSITED FERROELECTRIC THIN-FILMS

Authors
TYUNINA M SREENIVAS K BJORMANDER C WITTBORN J RAO KV
Citation
M. Tyunina et al., AN EXPERIMENTAL-STUDY AND MODELING OF THE THICKNESS DISTRIBUTION IN PULSED-LASER DEPOSITED FERROELECTRIC THIN-FILMS, Applied surface science, 96-8, 1996, pp. 831-835
Citations number
5
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
96-8
Year of publication
1996
Pages
831 - 835
Database
ISI
SICI code
0169-4332(1996)96-8:<831:AEAMOT>2.0.ZU;2-X
Abstract
We present a systematic experimental study of the thickness profiles a nd the growth rates of ferroelectric lead zirconium titanate (PZT) thi n films, formed by pulsed laser deposition, both in vacuum and in an o xygen ambient. The results are explained in terms of the adiabatic exp ansion model for the laser generated plasma plume.