THIN-FILM SHAPE-MEMORY ALLOY MICROACTUATORS

Thin film shape memory alloys (SMA's) have the potential to become a p rimary actuating mechanism for mechanical devices with dimensions in t he micron-to-millimeter range requiring large forces over long displac ements. The work output per volume of thin film SMA microactuators exc eeds that of other microactuation mechanisms such as electrostatic, ma gnetic, thermal bimorph, piezoelectric, and thermopneumatic, and it is possible to achieve cycling frequencies on the order of 100 Hz due to the rapid heat transfer rates associated with thin film devices. In t his paper, a quantitative comparison of several microactuation schemes is made, techniques for depositing and characterizing Ni-Ti-based sha pe memory films are evaluated, and micromachining and design issues fo r SMA microactuators are discussed. The substrate curvature method is used to investigate the thermo-mechanical properties of Ni-Ti-Cu SMA f ilms, revealing recoverable stresses up to 510 MPa, transformation tem peratures above 32 degrees C, and hysteresis widths between 5 and 13 d egrees C. Fatigue data shows that for small strains, applied loads up to 350 MPa can be sustained for thousands of cycles, Two micromachined shape memory-actuated devices-a microgripper and microvalve-also are presented.