CHARACTERIZATION AND MODELING OF METAL-FILM MICROBOLOMETER

The characteristic thermal parameters of a platinum-film microbolomete r are extracted from the data of two measuring methods, A simple and a ccurate equivalent circuit model, along with its thermal behavior, is proposed for the device. Applying the model to simulate some device ci rcuits results in good agreement with the experimental data, Furthermo re, an effective method of ambient temperature compensation, proposed previously by our laboratory, is demonstrated both experimentally and by simulation using the same model. The established electro-thermal mo del therefore serves as an useful tool for SPICE simulations in the de sign of microbolometers.