The paper presents an analysis of the energetics of a few possible can
didates for the structural model of the root 3 X root 3 R30 degrees re
construction of the alpha-SiC(0001) surface. The analysis is based on
the semi-empirical, self-consistent, quantum-mechanical cluster calcul
ations of MNDO-type (AM1 parametrization). Clean stoichiometric, Si ri
ch and C rich surface structures as well as surfaces saturated by hydr
ogen and the hydroxyl groups are examined and particular care is appli
ed when comparing energies of the structures with different stoichiome
tries. The results confirm the claim that the most favorable model for
the reconstruction is here the one where hydrogenated triangles of C
atoms saturate the surface silicon dangling bonds. Moreover, the calcu
lated energies indicate that the reconstructed surface is a result of
the desorption of SiO from the 1 X 1 surface originally saturated by h
ydroxyl groups.