D. Aubel et al., GE SEGREGATION TESTED BY X-RAY PHOTOELECTRON DIFFRACTION AND SURFACE ATOM TITRATION DURING THE FIRST STAGE OF SI HETEROEPITAXY ON GE(001)2 X-1, Surface science, 352, 1996, pp. 634-640
The questions of growth morphology and Ge segregation during Si hetero
epitaxial growth on Ge(001)2 x 1 are addressed in the earliest stages
of MBE growth (0-3 monolayers) at room temperature (RT) and 400 degree
s C using in situ photoemission techniques. X-ray photoelectron diffra
ction (XPD) combined with surface atom titration by ultraviolet photoe
lectron spectroscopy (UPS), provides a unique way to reach information
about the elements (Si or Ge) located in the top layer and their stac
king sequences by tracking the appearances of forward scattering event
s for different polar directions and Si coverages. The observation of
forward scattering reinforcements for the Si2p core level intensity we
ll sooner than expected for laminar growth is in favour of Si agglomer
ation or (and) Ge segregation, The surface atom titration based on a s
elective reactivity of Ge and Si against RT NH3 adsorption shows that
at 400 degrees C the surface is essentially Ge terminated and that Ge
segregation is prevailing as opposed to the RT growth where Si termina
tion prevails. These results are compared to those obtained for the in
verted Ge/Si(001) interface.