A. Calcatelli et al., STUDY OF OUTGASSING OF SPUTTER-ION PUMP MATERIALS TREATED WITH 3 DIFFERENT CLEANING PROCEDURES, Vacuum, 47(6-8), 1996, pp. 723-726
The paper discusses the results of a study performed on the materials
used for the fabrication of sputter-ion pumps, namely, stainless steel
for the anode and body, and titanium for the cathodes. The TDS techni
que has been applied to study the efficacy of different cleaning proce
dures (acid and basic baths and vacuum firing) normally adopted by the
vacuum industry to minimize the amount of gases absorbed in these mat
erials. With all the samples studied, one chemical cleaning procedure
seems to be enough, instead of the two usually adopted. With the anode
and body samples, a second chemical cleaning seems to increase surfac
e contamination; then, with the anode sample, vacuum firing reduces th
e outgassing to that of the first cleaning. Vacuum firing was found to
be very effective in the case of the cathode material. In fact, with
titanium cleaned by any of these procedures, hydrogen forms about 97%
of all the occluded gases and though vacuum firing reduces outgassing
by almost 80%, hydrogen continues to be the major species desorbed. Co
pyright (C) 1996 Published by Elsevier Science Ltd.