SELF-CONSISTENT PARTICLE SIMULATION OF 3-DIMENSIONAL DC MAGNETRON DISCHARGE

Authors
NANBU K SEGAWA S KONDO S
Citation
K. Nanbu et al., SELF-CONSISTENT PARTICLE SIMULATION OF 3-DIMENSIONAL DC MAGNETRON DISCHARGE, Vacuum, 47(6-8), 1996, pp. 1013-1016
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
47
Issue
6-8
Year of publication
1996
Pages
1013 - 1016
Database
ISI
SICI code
0042-207X(1996)47:6-8<1013:SPSO3D>2.0.ZU;2-K
Abstract
The structure of fully three-dimensional de magnetron discharge is cla rified by the use of the PIC/MC method. Magnets are placed in the form of a racetrack with the practical dimensions of industrial sputtering apparatus. The cathode sheath is found only in the region between the two magnets. Plasma density is highest near the location of a double thickness of sheath. Plasma is widely distributed between the electrod es but its width is limited and equal to the gap between the magnets. Copyright (C) 1996 Elsevier Science Ltd.