RBS STUDY OF DEFECT PROFILES IN PROTON-IMPLANTED LINBO3

Citation
So. Salem et al., RBS STUDY OF DEFECT PROFILES IN PROTON-IMPLANTED LINBO3, Radiation effects and defects in solids, 136(1-4), 1995, pp. 1013-1016
Citations number
7
Categorie Soggetti
Physics, Condensed Matter","Nuclear Sciences & Tecnology
ISSN journal
10420150
Volume
136
Issue
1-4
Year of publication
1995
Pages
1013 - 1016
Database
ISI
SICI code
1042-0150(1995)136:1-4<1013:RSODPI>2.0.ZU;2-F
Abstract
Single crystals of lithium niobate were implanted at room temperature with 20 keV protons at fluences ranging from 5 x 10(16) H+/cm(2) to 2 x 10(17) H+/cm(2). Rutherford Backscattering Spectrometry in channelin g geometry (RBS-C) performed at three beam energies (1, 1.5, and 2 MeV ) and subsequent analysis of the energy dependence of the dechanneling cross section enabled us to show the predominant induced lattice defe cts are likely of a 'point' nature. Electron microscopy investigations also support this assumption.