Single crystals of lithium niobate were implanted at room temperature
with 20 keV protons at fluences ranging from 5 x 10(16) H+/cm(2) to 2
x 10(17) H+/cm(2). Rutherford Backscattering Spectrometry in channelin
g geometry (RBS-C) performed at three beam energies (1, 1.5, and 2 MeV
) and subsequent analysis of the energy dependence of the dechanneling
cross section enabled us to show the predominant induced lattice defe
cts are likely of a 'point' nature. Electron microscopy investigations
also support this assumption.