ULTRAVIOLET-LIGHT IMPRINTED SOL-GEL SILICA GLASS WAVE-GUIDE DEVICES ON SILICON

We describe a new simplified process for inexpensive fabrication of lo w-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light im printing in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication proces s is appealing because the buffer layer between waveguide and substrat e is eliminated, and waveguides can be made in a few steps using low-c ost equipment. Also, a 1 x 8 power splitter is produced by this proces s. The splitter exhibits relatively uniform output and a configuration loss of 0.9 dB at 1.55 mu m wavelength.