CMOS MICROMACHINED CANTILEVER-IN-CANTILEVER DEVICES WITH MAGNETIC ACTUATION

Authors
SHEN B ALLEGRETTO W HU M ROBINSON AM
Citation
B. Shen et al., CMOS MICROMACHINED CANTILEVER-IN-CANTILEVER DEVICES WITH MAGNETIC ACTUATION, IEEE electron device letters, 17(7), 1996, pp. 372-374
Citations number
12
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
IEEE electron device letters → ACNP
ISSN journal
07413106
Volume
17
Issue
7
Year of publication
1996
Pages
372 - 374
Database
ISI
SICI code
0741-3106(1996)17:7<372:CMCDWM>2.0.ZU;2-T
Abstract
A novel magnetically actuated cantilever microactuator which produces a large angular deflection is described. The device is a nested cantil ever structure for improved sensitivity, and is fabricated entirely us ing a standard CMOS process. The cantilever deflects bidirectionally, and has a static deflection of more than 2.5 degrees. It has a respons e time of 25 mu s and at resonance has a deflection of more than 25 de grees.